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Input & Output Power
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- Input: 208 - 240VAC, 20 A, 50/60 Hz, single phase
- Total Power required: 5 KW ( including pump)
- other 3 phase voltage is available upon request
- Output: 0 - 8VAC max. and 200A Max. (1600 W Max. )
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Vacuum Chamber
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- Stainless steel chamber: 300mm ID. x 360 mm Height, Sand-blasting electrolytic polishing surface
- 100 mm observation window in front of the chamber
- Hinged-type door for easy sample loading
- Electrically-driven shutters are on top of each evaporation W boat, which allows evaporating 4 kinds of material one by one
- One KF40 port with a gate valve to connect to DN 100 ISO-K the turbo pump directly
- One KF16 port to connect the vacuum gauge
- Six CF35 ports to connect a necessary device (e.g. film thickness monitor)
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Vacuum Pump ( optional)
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- A high-speed turbo vacuum pump is optional at extra cost (click the picture left to see specs )
- Vacuum level: 5.0x10-6 Torr ( after 40 minutes of pumping )
- Limit vacuum: 5.0x10-7 Torr ( after baking at 100 -150°C)
- Leaking rate: 5.0x10-7 Pa.
- Vacuum Port: DN 100 ISO-K
- A mechanical pump () is better to install in series to initially achieve the vacuum level of 3E-3Torr, which is good for subsequent turbopumps to achieve the target vacuum level.
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Evaporation Source
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Sample Holder
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- Four tungsten heating boats are included supported by water-cold electrodes
- The tungsten heating boat has dimensions 70L x 12W x 3H (mm). Spare W boat is available at extra cost)
- Each top of the boat has a manual operation shutter
- Built-in manual shutter allows evaporation source can be used without contamination
- 120 mm diameter rotating sample holder is on top of the chamber with a diameter of 300mm,
- The distance between the evaporation source and sample holder is 140-200 mm adjustable
- The sample stage with a heating function (up to 500 °C) is optional and is available upon request
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In-situ thickness monitor optional
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- Hi-resolution Film Thickness Monitor and Controller are optional (click the picture left to see detailed specs )
- The accuracy of thickness control is 1.0 Angstrom.
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Control Unit
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- Vacuum, thickness, and power control are integrated into one control box
- The Control Unit is separated from the vacuum chamber for easy moving
- You may place the control unit on top of the vacuum station
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Facility Requirement
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- Space: 250 SF with height > 6 feet
- Power: 208 - 240V AC, single phase with Max 10KW ( 50A breaker)
- Water: > 16L/minute flowing water required for electrode cooling. You may order recirculating water chiller to save water by clicking the picture below at extra cost.
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Certificate
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